WAFER TRANSPORT MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a mechanism and a method for transporting a workpiece at comparatively high temperatures so as to arrange the workpiece at a predetermined position on an arm member that holds the workpiece without the need of an additional process. SOLUTION: The transport mechanism for transporting a workpiece has an arm member including a tip protrusion provided at its tip that comes into contact with the surroundings of the workpiece and limits the movement of the workpiece. The arm member further includes a plurality of support protrusions that protrude from its surface for coming into contact with and supporting the backside of the workpiece. COPYRIGHT: (C)2006,JPO&NCIPI