| 摘要 |
<p>A transfer robot is provided with a radiation side high radiation ratio section (41) and a heat receiving side high radiation ratio section (42) which face each other. Heat transferred from the substrate to a base section (30) by heat conduction is radiated from the radiation side high radiation ratio section (41) as radiation heat, and the radiation heat is absorbed by the heat receiving side high radiation ratio section (42). Since the heat receiving side high radiation ratio section (42) is formed on a heat receiving plate (15) thermally connected with a vacuum tank (7), the radiation heat absorbed by the heat receiving side high radiation ratio section (42) is transferred to the vacuum tank (7). Therefore, even in the case of transferring a high temperature substrate in a vacuum atmosphere, heat from the substrate is not accumulated in a transfer system, and the temperature of the transfer system is not easily increased to be high.</p> |
