| 摘要 |
The invention relates to a vacuum device comprising several cryopumps (10), in particular several cryopumps connected in parallel. In addition, the device is equipped with at least one compressor unit (16), which is connected to the cryopumps (10) via medium supply lines (12). A medium return line (14) is likewise connected to the compressor unit (16) and the cryopumps (10). A reservoir (20) for the medium is positioned between the medium supply line (12) and the medium return line (14). A pressure gauge (30), which is connected to a supply valve (26) by means of a control unit (32), is also located in the medium supply line. To maintain the pressure differential in the cryopumps (10) at a level that is as constant as possible, the supply valve (26) is opened if the pressure in the medium supply line (12) exceeds a threshold value, thus allowing the medium to flow into the reservoir (20).
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