发明名称 |
PHOTOMASK BLANK HOUSING CONTAINER, METHOD FOR HOUSING PHOTOMASK BLANK, METHOD FOR STORING PHOTOMASK BLANK, METHOD FOR TRANSPORTING PHOTOMASK BLANK, AND METHOD FOR MANUFACTURING PHOTOMASK |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a photomask blank housing container which can suppress both of changes in the sensitivity of a resist film by gas contamination of a housed photomask blank and contamination by dust and which facilitates storage and transportation. <P>SOLUTION: The container for housing a photomask blank having a resist film formed thereon comprises at least a container body, a cover, and a gas adsorbing cassette, wherein the gas adsorbing cassette holds an organic gas adsorbent and/or a basic gas adsorbent and is detachably attached to one of the side faces or the bottom face of the container body and the upper face of the cover. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
申请公布号 |
JP2006154020(A) |
申请公布日期 |
2006.06.15 |
申请号 |
JP20040341561 |
申请日期 |
2004.11.26 |
申请人 |
SHIN ETSU CHEM CO LTD |
发明人 |
WATANABE MASATAKA;SANUKI YUKINOBU |
分类号 |
B65D81/26;B65D85/86;G03F1/50;G03F1/66;H01L21/027 |
主分类号 |
B65D81/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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