PRESSURE AND TEMPERATURE DISTRIBUTION MEASUREMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a measurement system for measurement of distribution of a physical amount such as air pressure or temperature in the space in particular in a vacuum chamber. SOLUTION: The pressure and temperature distribution measurement system for measuring the distribution of the physical amount in a desired space is provided with a sensing unit composed of sensor chips 100 equipped on the tips of sensor support pipes 101-112 which are formed of pipes or rods and capable of maintaining each form for distributing them at the desired positions for measuring the distribution of the physical amount. COPYRIGHT: (C)2006,JPO&NCIPI