| 摘要 |
PROBLEM TO BE SOLVED: To provide a decompression drier capable of exhausting gas from an exhaust port efficiently even when setting up the distance between a support plate and the bottom of a chamber very small. SOLUTION: The decompression drier comprises a chamber 10 consisting of a lid 11, a packing 12, and a base 13; support pins 15 stood up on the base 13 in the chamber 10; and a rectangular shaped support plate 22 in a plan view where two or more rise-and-fall pins 21 are stood up. On the undersurface of the support plate 22, air passages 50 are formed from the position opposite to the exhaust port 31 to the position of the end edge of the support plate 22. The air passages 50 is constituted of a seat reeling part in a rectangular shape formed from the position opposite to the exhaust port 31 to the edge region of the support plate 22. COPYRIGHT: (C)2006,JPO&NCIPI
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