| 摘要 |
PROBLEM TO BE SOLVED: To provide a stable and high-sensitivity mechanical vibrator of nanometer order, equipped with significant power or mass variation detection resolution of nanometer order, its manufacturing method and a measuring device that uses it. SOLUTION: In this manufacturing method, an oxide silicon film 102 and silicon film are formed sequentially on a silicon substrate 101. First the silicon film is processed into a tetrahedral silicon 103A by anisotropic etching. Next, the tetrahedral silicon 103A is used as a mask, to provide etching in the normal direction of the substrate to produce a columnar oxide silicon 102A. Silicon and chrome are evaporated obliquely with respect to the silicon substrate 101, so that one side of the tetrahedral (triangular pyramid) silicon 103A faces the source of evaporation. Thus, the silicon and chrome are evaporated one surface of 103A and to one side of the columnar oxide silicon 102A. Then, hydrofluoric acid is used to remove the columnar oxide silicon 102A. COPYRIGHT: (C)2006,JPO&NCIPI
|
