| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and the like for realizing easy measurement of surface potential. SOLUTION: The surface potential measuring method includes arranging a first fixed electrode apart from the surface to be measured; arranging a second fixed electrode apart from the surface to be measured and closer to the surface to be measured than the first fixed electrode; connecting one end of the first capacitor to the first fixed electrode and the other end of the first capacitor to a reference potential line; connecting one end of the second capacitor to the second fixed electrode and the other end of the first capacitor to a reference potential line; detecting of the inter-terminal voltage of the first capacitor and the inter-terminal voltage of the second capacitor; and calculating a voltage value corresponding to the potential of the surface to be measured, by applying a predetermined operation equation to the detected inter-terminal voltage of the first capacitor and the inter-terminal voltage of the second capacitor. COPYRIGHT: (C)2006,JPO&NCIPI
|
