| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive inspection device which enables inspection of an inspection target in a short time with high accuracy, even when the inspection target different in size is inspected by a single inspection device. SOLUTION: A plurality of CCD cameras 20-21 are installed in the inspection device and the inspection device is constituted so as to perform operation so that the inspection of the region of a workpiece 10 by a single CCD camera and the scanning number and width of the work piece 10 by a single CCD camera become uniform in the CCD cameras 20-21 to preset the positions of the CCD cameras. Even when the inspection target of different size is inspected, efficient inspection can be performed because all of the CCD cameras are used at the time of inspection; and the processing efficiency of the image taken by the CCD cameras can be enhanced, by uniformizing the image quantities processed by the CCD cameras. COPYRIGHT: (C)2006,JPO&NCIPI
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