EVAPORATION SOURCE AND VAPOR DEPOSITION APPARATUS PROVIDED WITH IT

摘要

PROBLEM TO BE SOLVED: To provide an evaporation source which effectively raises a temperature of a nozzle by using a reflector plate, and thereby prevents an evaporated material from being condensed at the nozzle. SOLUTION: This evaporation source comprises: a vaporizing-material storage section for storing a vaporizing material and having one part opened; a nozzle which has an opening for spraying the vaporizing material and is connected to the opened part of the vaporizing-material storage section; the reflector plate surrounding at least some corners of the nozzle; a housing surrounding the vaporizing-material storage section; and a heating section arranged between the housing and the vaporizing-material storage section. COPYRIGHT: (C)2006,JPO&NCIPI