CERAMIC-METAL COMPOUND MATERIAL, ITS FORMING PROCESS, AND CONDUCTIVE MEMBER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To solve the problem that cracking and crazing heretofore produced in a ceramic-metal composite material completed by rapid shrinkage of the metal in its cooling process after porous ceramic is impregnated under pressurization with the molten metal in the ceramic-metal composite material used mainly for semiconductor and liquid crystal production processes etc. SOLUTION: The ceramic-metal composite material having the metal in the pores of the porous ceramic composed of silicon nitride is characterized in that crystal particles of the silicon nitride at the boundary surfaces of the porous ceramic and the metal are bonded to each other via the metal. COPYRIGHT: (C)2006,JPO&NCIPI