| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid transfer device in which a plurality of piezoelectric elements for applying a pressure to a liquid in a plurality of pressure chambers can be arranged by a high density, and moreover which can surely suppress crosstalk generated at the time of deformation of the piezoelectric elements. SOLUTION: A piezoelectric actuator 3 is equipped with a diaphragm 30 which covers the plurality of pressure chambers 14, the plurality of piezoelectric elements 42 each set at a face of the opposite side to the pressure chambers 14 of the diaphragm 30 and in a region that overlaps with the plurality of pressure chambers 14, first supporting parts 43 coupled via a ceiling 45 to the plurality of piezoelectric elements 42 and disposed to hold a region where the plurality of pressure chambers 14 are arranged, and second supporting parts 44 coupled similarly via the ceiling 45 to the plurality of piezoelectric elements 42 and disposed in a region that overlaps with a partition part that separates the plurality of pressure chambers 14. COPYRIGHT: (C)2006,JPO&NCIPI
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