| 发明名称 |
SEMICONDUCTOR PROCESSING COMPONENTS AND SEMICONDUCTOR PROCESSING UTILIZING SAME |
| 摘要 |
A semiconductor processing component includes a substrate and a layer overlying the substrate. The layer has a composition ReA<SUB>y</SUB>O<SUB>1.5+2y</SUB>, wherein Re is Y, La, a Lanthanoid series element, or a combination thereof, A is (Si<SUB>1-a</SUB> Ge<SUB>a</SUB>), 0.25 y 1.2, and 0 a 1. |
| 申请公布号 |
WO2006023894(A3) |
申请公布日期 |
2006.06.15 |
| 申请号 |
WO2005US29889 |
申请日期 |
2005.08.23 |
| 申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
NARENDAR, YESHWANTH;SIMPSON, MATTHEW, A.;HENGST, RICHARD, R. |
| 分类号 |
C23C16/44 |
主分类号 |
C23C16/44 |
| 代理机构 |
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