| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus and an exposure method with high productivity by which deterioration in image quality due to fog by irradiation with leaked light is prevented in a standby period for image data processing prior to exposure while the light quantity is in a stable state without turning off a light source and transition from the standby period to an exposure operation is smoothly carried out. <P>SOLUTION: During a standby period after an alignment mark is read out by a CCD camera 24 and until image conversion process based on the read data is performed to start exposure in the exposure apparatus, a stage 14 is moved in an exposure direction at a calculated velocity in a position where the irradiation range by an exposure unit 18 is in a leaked light area 72 on a photosensitive material 30 or the photosensitive material 30 is out of the irradiation range by the exposure unit 18. The moving velocity is calculated based on the standby period and the distance from the position of the exposure unit 18 to the exposure start position 74 on the photosensitive material 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
