| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressurizing device and a circuit chip mounting device which can shorten a processing operation time. SOLUTION: A first guide 16 guides the axial movement of a support shaft 15. Second guides 19 guide the parallel movement of a moving member 17 to the center axis of the support shaft 15. The first guide 16 is supported by a support member 21. The support shaft 15 and the moving member 17 are connected with a force sensor 22. In such a pressure applying device 13, the first guide 16 is fixed to the support member 21. During the movement of the moving member 17, the support member 21 is kept in its stationary state. The movement of a contact member 14 is limited to its axial direction. The rocking of the contact member 14 having the force sensor 22 as a fulcrum is avoided. The movement of the first guide 16 causes avoidance of resonance of the contact member 14. Upon positioning the contact member 14, a high frequency servo band can be used. The movement of the contact member 14 can be made fast. The contact member 14 can be positioned at a predetermined location. The processing operation time can be shortened. COPYRIGHT: (C)2006,JPO&NCIPI |
