| 摘要 |
PROBLEM TO BE SOLVED: To provide a winding type vapor deposition appatatus which is excellent in productivity and capable of forming a metal film without causing the heat deformation of a base film comprising a single-layer plastic film, and a winding type vapor deposition method. SOLUTION: There is provided an electron beam irradiator 21 which irradiates the base film 12 with an electron beam before the deposition of the metal film, and a DC bias supply 22 whose positive and negative electrodes are connected to a can roller 14 and an auxiliary roller 18, respectively. Before the deposition of the metal film, the base film 12 is electrostatically charged by electron beam radiation to be attached to the can roller 14. After the deposition of the metal film, the base film 12 is attached to the can roller 14 by a bias voltage applied between the can roller 14 and the metal film which is electrically connected to the auxiliary roller 18. COPYRIGHT: (C)2006,JPO&NCIPI
|
