METHOD FOR MANUFACTURING METAL MASK, MASK OF ARTWORK MASTER FOR ELECTROFORMING AND ARTWORK MASTER

摘要

PROBLEM TO BE SOLVED: To obtain a metal mask for vapor deposition suitable for forming a light-emitting layer of an organic EL display. SOLUTION: An artwork master 25 for electroforming is provided with an approximately trapezoidal salient 22a having an inclined side wall which is made of a resist 22 placed on an electroconductive film 20 of a base substrate 19. The metal mask 35 is formed by steps of: depositing a desired metal 34 on the electroconductive film 20 along the inclined side wall of the approximately trapezoidal salient 22a made of the resist 22 in its height direction by using the artwork master 25 by an electroforming method; and then peeling the metal. Thereby, the metal mask 35 acquires an opening 35a having the inner side wall inclined. The light-emitting layer of a light-emitting organic material is formed into a uniform thickness on a substrate to be film-formed by the use of the metal mask by vapor deposition, because the metal mask does not form a shadow between an evaporation source for vaporizing the light-emitting organic material and the substrate to be film-formed. COPYRIGHT: (C)2006,JPO&NCIPI