发明名称 Method for producing a conductive layer
摘要 In a method for producing a conductive layer a substrate is provided. On the substrate, a layer comprised of at least two different metal nitrides is provided. Especially, on a surface of the substrate a first metal nitride layer, on a surface of the first metal nitride layer a second metal nitride layer, and on a surface of the second metal nitride layer a third metal nitride layer is deposited.
申请公布号 US2006128128(A1) 申请公布日期 2006.06.15
申请号 US20050296568 申请日期 2005.12.08
申请人 INFINEON TECHNOLOGIES AG 发明人 HINTZE BERND;KUDELKA STEPHAN;SUNDQVIST JONAS
分类号 H01L21/20 主分类号 H01L21/20
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