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发明名称
摘要
申请公布号	JP3122476(U)	申请公布日期	2006.06.15
申请号	JP20060002303U	申请日期	2006.03.29
申请人		发明人
分类号	H01L21/205;H01L21/31;(IPC1-7):G09F3/00;G09F3/10	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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