发明名称 COMPOSITE FOR POLISHING AND POLISHING METHOD USING IT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a composite for polishing more ideally usable in usage to polish an oxide monocrystal substrate, etc. <P>SOLUTION: This composite for polishing contains an abrasive, an aldose derivative which is at least either one of acid provided by oxidation of aldose and its salt and water. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006150482(A) 申请公布日期 2006.06.15
申请号 JP20040342932 申请日期 2004.11.26
申请人 FUJIMI INC 发明人 HOSHIYA SACHIKO;TOMATSU MASATOSHI
分类号 B24B37/00;C09K3/14 主分类号 B24B37/00
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