Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
申请公布号
EP1669474(A1)
申请公布日期
2006.06.14
申请号
EP20050257531
申请日期
2005.12.07
申请人
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C.
发明人
SHENAI-KHATKHATE, DEODATTA VINAYAK;TIMMONS, MICHAEL L.;MARSMAN, CHARLES R.;WOELK, EGBERT;DICARLO, RONALD L.