| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device which holds a substrate while positioning the substrate in contact with the periphery of the substrate even when part of the substrate in its peripheral direction is notched. SOLUTION: While holding a wafer 21 by either a first guide 51a or a second guide 51b and either a first moving part 24 or a second moving part 25, the first guide 51a, the second guide 51b, the first moving part 24 and the second moving part 25 are respectively arranged with spaces N2 to N5 in the peripheral direction of the virtual cylinder more than a peripheral-direction distance N1 of the arc of an absent area 18 notched for forming an orientation flat 19. Thus, the wafer 21 can be held by at least three of the first guide 51a, the second guide 52b, the first moving part 24 and the second moving part 25, and the wafer 21 can be held in contact with the periphery of the wafer 21 without regard to the position of the orientation flat 19. COPYRIGHT: (C)2005,JPO&NCIPI |
