发明名称 |
Semiconductor processing tool front end interface with sealing capability |
摘要 |
A sealing member provides a seal between a front opening unified pod (FOUP) and a semiconductor processing tool. The seal inhibits fluid flow between an ambient environment and a minienvironment in a front end of the processing tool while the FOUP and minienvironment are open to one another for transporting wafers between the processing tool and the FOUP.
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申请公布号 |
US2005169730(A1) |
申请公布日期 |
2005.08.04 |
申请号 |
US20040834577 |
申请日期 |
2004.04.29 |
申请人 |
AGGARWAL RAVINDER;KUSBEL JAMES F. |
发明人 |
AGGARWAL RAVINDER;KUSBEL JAMES F. |
分类号 |
H01L21/00;H01L21/677;(IPC1-7):B65G1/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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