| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reliable vibration actuator wherein the strength of bonding between the surface of an elastic body and a conductive resin material is enhanced, and stable bonding strength and a low contact resistance value are secured regardless of deterioration with age and variations in environment, and provide a manufacturing method for the vibration actuator. <P>SOLUTION: The vibration actuator comprises a vibrating body 11 having an elastic body 12 that is bonded to a piezoelectric body 12 excited by a driving signal and generates oscillatory waves on its driving face by excitation. The vibration actuator is provided with a conductive joint that is formed on the vibrating body 11 and bonds the elastic body 12 and the piezoelectric body 13 with a conductive bonding material 32 so that electrical continuity can be established between them. The elastic body-side joint of the elastic body where the conductive bonding material is applied for bonding is so controlled that ten-point average roughness Rz is within a range of 4 to 7μm. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
