| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement gauge capable of highly accurate displacement measurement by a simple composition. SOLUTION: A tip of a detection member 5 is connected to a measuring object 7. Displacement of the measuring object 7 is transmitted to the detection member 5 including a vibration component and a rotation component. A bearing 3 is attached to a one end side of a connection member 6, and it supports the detection member 5 such that the detection member 5 freely rotates around an axis in parallel with a direction of a displacement component. A contact type displacement sensor 2 detects the displacement on the basis of a position of a magnet 8 attached to another side of the connection member 6, and the displacement of the measuring object 7 transmitted to the bearing 3 in a non-contact state via the detection member 5 can be magnetically detected. Since the contact type displacement sensor 2 detects displacement of the bearing 3 via the connection member 6, a linear displacement component excluding the rotation component of the measuring object 7 cut off by the bearing 3 can be detected via displacement of the bearing 3 and the connection member 6. The vibration component can be absorbed by vibration absorbing means 4a and 4b. COPYRIGHT: (C)2005,JPO&NCIPI
|
