发明名称 METHOD FOR PRODUCING GALLIUM-CONTAINING NITRIDE SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method enabling melt-growth of a gallium-containing nitride single crystal by using inexpensive equipment, in which there is little danger, especially a method enabling the melt-growth at normal pressure. SOLUTION: In the method for growing the gallium-containing nitride single crystal on a seed crystal substrate by a reaction of molten gallium, held in a vessel in a crystal growth chamber, with nitrogen gas, a eutectic alloy melt of gallium (Ga) is formed, then the seed crystal substrate, on which a mesh-like, striped, or perforated polka dot-like catalyst metal is adhered, is dipped in the eutectic alloy melt, and a gallium-containing nitride single crystal phase is grown on the surface of the seed crystal substrate by Grapho-epitaxy method comprising reacting nitrogen dissolving in the eutectic alloy melt from a space part including a nitrogen supplying source on the surface of the melt, and gallium being one of eutectic alloy components on the surface of the seed crystal substrate. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005206403(A) 申请公布日期 2005.08.04
申请号 JP20040013114 申请日期 2004.01.21
申请人 JAPAN SCIENCE & TECHNOLOGY AGENCY 发明人 FUKUDA TSUGUO;DIRK EHRENTRAUT;YOSHIKAWA AKIRA
分类号 C30B29/38;C30B11/14;C30B17/00;C30B19/00;C30B19/04;C30B19/12;C30B29/40;(IPC1-7):C30B29/38 主分类号 C30B29/38
代理机构 代理人
主权项
地址