发明名称 |
Apparatus for manufacturing flat panel display devices |
摘要 |
A mechanism for always measuring the spatial intensity distribution of a laser beam and displacement of the optical axis of the laser beam is provided so that a measured signal is processed when the laser beam incident on a laser beam shaping optical element is out of a predetermined condition. The shape, diameter and incidence position of the laser beam incident on the laser beam shaping optical element are always kept in the predetermined condition by a spatial filter disposed at the position of a focal point of lenses forming a beam expander disposed in the optical axis, on the basis of a result of the signal processing. In this manner, silicon thin films uniform in crystallinity can be formed stably with a high yield on an insulating substrate which forms display panels of flat panel display devices.
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申请公布号 |
US2005170569(A1) |
申请公布日期 |
2005.08.04 |
申请号 |
US20040991482 |
申请日期 |
2004.11.19 |
申请人 |
YAZAKI AKIO;HONGO MIKIO;HATANO MUTSUKO;NODA TAKESHI |
发明人 |
YAZAKI AKIO;HONGO MIKIO;HATANO MUTSUKO;NODA TAKESHI |
分类号 |
G02F1/1345;B23K26/00;B23K26/06;B23K26/073;B23K26/42;G02F1/136;G02F1/1368;G09G3/36;G09G3/38;H01L21/00;H01L21/20;H01L21/268;H01L21/324;H01L21/336;H01L21/84;H01L29/786;(IPC1-7):H01L21/00 |
主分类号 |
G02F1/1345 |
代理机构 |
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地址 |
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