发明名称 Sample preparation method for transmission electron microscopy in which material is first removed from a sample using ultra-short pulse laser ablation under vacuum and then inert gas ions are fired at the remaining thin bar
摘要 <p>Method for preparing material samples for transmission electron microscopy in which material is removed from the samples using ultra-short pulse laser ablation within a vacuum chamber. The resulting remaining narrow bar is then processed using inert gas ions so that the bar becomes transparent to electrons.</p>
申请公布号 DE102004001173(A1) 申请公布日期 2005.08.04
申请号 DE20041001173 申请日期 2004.01.05
申请人 3D-MICROMAC AG 发明人 HOECHE, THOMAS;HAENEL, JENS;PETSCH, TINO
分类号 G01N1/28;G01N1/44;G01N23/04;G01N23/22;(IPC1-7):G01N1/28 主分类号 G01N1/28
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