EXPOSURE DEVICE HAVING A PLANAR MOTOR,申请号EP19990933725-传众专利搜索

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发明名称	EXPOSURE DEVICE HAVING A PLANAR MOTOR
摘要
申请公布号	EP1064713(A4)	申请公布日期	2005.07.20
申请号	EP19990933725	申请日期	1999.07.07
申请人	NIKON CORPORATION;HAZELTON, ANDREW J.	发明人	HAZELTON, ANDREW, J.;TANAKA, KEIICHI;EATON, JOHN, K.
分类号	H01J37/20;G03F7/20;H01L21/027;H01L21/68;H02K41/02;H02K41/03;(IPC1-7):H02K41/00	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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