| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope which permits easy use, even under extreme conditions. SOLUTION: Light from a laser diode 31 is directed and irradiated on the surface of a cantilever 1 by an optical fiber 32. The irradiated light is focused by a lens 33, to be irradiated on the surface of the cantilever 1. The light reflected by the surface of the cantilever 1 is focused by lenses 411 and 412 to be inputted into optical fibers 421 and 422. The light which pass through the optical fibers 421 and 422 is received by photodiodes 431 and 432. Based on the change in the amount of light received, the inclination of the cantilever 1 is detected. COPYRIGHT: (C)2005,JPO&NCIPI |
