| 摘要 |
<p>PURPOSE:To make it possible to combine a cathode substrate to a cup body with high reliability while maintaining the porous state of the substrate in a powder forming process for the substrate by integratedly pressing and baking both bodies while employing the cup body as a base. CONSTITUTION:In a powder forming process for a cathode substrate 1, a cup body 2 is mounted into a die of a press. Then, powder for the substrate 1 is put into the die for pressing it together with the cup body 2. Thus, the formed powder for the substrate 1 and cup body are integrated, thereafter baked in vacuum at about 1,900 deg.C. Thereby reaction layer of alloy or compound generated at the interference of the substrate 1 to the cup body 2 so as to forcibly combine body bodies. Especially, the binding force at the bottom portion 2A of the cup body 2 which is most important for the thermal transmission from a heater 5 can be ensured.</p> |
