| 发明名称 |
ADDITIVE OR SUBTRACTIVE CHEMICAL PROCESS |
| 摘要 |
An intense laser beam is focused at a jet nozzle through which an electrolyte is directed towards a substrate, so that the laser beam travels with the jet to the substrate. The laser beam heats the site of the substrate on which it falls, and thereby enhances the etching or plating process being carried out in the substrate. |
| 申请公布号 |
DE3467779(D1) |
申请公布日期 |
1988.01.07 |
| 申请号 |
DE19843467779 |
申请日期 |
1984.05.21 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GELCHINSKI, MORDECHAI HIRSH;ROMANKIW, LUBOMYR TARAS;VIGLIOTTI, DONALD RICHARD;VON GUTFELD, ROBERT JACOB |
| 分类号 |
H01L21/306;C23F1/00;C25D5/02;C25D5/08;C25F3/14;H05K3/06;H05K3/24;(IPC1-7):C25D5/02;C23C18/16;C23F1/02 |
主分类号 |
H01L21/306 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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