APPARATUS FOR MEASURING SEMICONDUCTIVE ELEMENT

摘要

PURPOSE:To omit a carrier, by providing a means for successively feeding a comb in a predetermined direction and the test head arranged at the position opposed to the comb and having a positioning pin and a plurality of contact pins. CONSTITUTION:A magazine 1 upwardly driven by one step by an up-and-down movement drive apparatus and the flat outer frame body 3 on he step part 1a positioned on the same plane as a feed apparatus 4 is successively push out to the feed apparatus 4 one at a time by a push-out means. The feed apparatus 4 is started by the control signal from the control apparatus 8 and the comb 3 on the feed apparatus 4 is fed at the position of a test head 5. After a semiconductive device 22 is measured by the test head 5 and a tester 6, the flat outer frame body 3 is fed toward a magazine 2 by the feed apparatus 4 and pushed in the magazine 2 to be received on the predetermined stepped part 2a thereof. Further, the magazine 2 also moves up and down in synchronous relation to the magazine 1 and a plurality of the flat outer frame bodies 3 after the finish of measurement are successively receiving in parallel.