发明名称 THERMAL HEAD
摘要 PURPOSE:To enhance reliability by reducing the change in resistance with the elapse of time and to increase a speed by improving heat efficiency, by forming a heat generating resistor layer of membrane oxide containing ruthenium oxide as the first main component and constituting a part of an electrode layer of an alloy layer based on Ti. CONSTITUTION:A glaze layer 11 is formed on a substrate 10 composed of ceramic such as Al2O3 and, after washing, a heat generating resistor layer 12 composed of a RuO2 membrane resistor is formed on the glaze layer 11. An electrode layer 15 having a two-layered structure composed of a lead electrode 13 and a lead layer 14 composed of Au is laminated to said heat generating resistor layer 12 and an abrasion resistant layer 16 is formed. These layers are formed by a method wherein MRuO3 (wherein M is Ca, Sr or Ba) is used as a target to be applied to the alumina substrate 10 having the glaze layer 11 formed thereto at first in a film form by RF sputtering and a Ti-Fe alloy and Au are subsequently applied in succession by a vapor deposition method and, thereafter, patterning is applied to the resistor and Al2O3 is further applied by RF sputtering to form the abrasion resistant layer 16.
申请公布号 JPS63122574(A) 申请公布日期 1988.05.26
申请号 JP19860270525 申请日期 1986.11.13
申请人 TOKYO ELECTRIC CO LTD;TOSHIBA CORP 发明人 KOBAYASHI YOZO;MOCHIZUKI TOKUHITO;TAKIGAWA OSAMU;HIRAKI HIDEAKI
分类号 B41J2/335;H01L49/02 主分类号 B41J2/335
代理机构 代理人
主权项
地址