摘要 |
PURPOSE:To enhance reliability by reducing the change in resistance with the elapse of time and to increase a speed by improving heat efficiency, by forming a heat generating resistor layer of membrane oxide containing ruthenium oxide as the first main component and constituting a part of an electrode layer of an alloy layer based on Ti. CONSTITUTION:A glaze layer 11 is formed on a substrate 10 composed of ceramic such as Al2O3 and, after washing, a heat generating resistor layer 12 composed of a RuO2 membrane resistor is formed on the glaze layer 11. An electrode layer 15 having a two-layered structure composed of a lead electrode 13 and a lead layer 14 composed of Au is laminated to said heat generating resistor layer 12 and an abrasion resistant layer 16 is formed. These layers are formed by a method wherein MRuO3 (wherein M is Ca, Sr or Ba) is used as a target to be applied to the alumina substrate 10 having the glaze layer 11 formed thereto at first in a film form by RF sputtering and a Ti-Fe alloy and Au are subsequently applied in succession by a vapor deposition method and, thereafter, patterning is applied to the resistor and Al2O3 is further applied by RF sputtering to form the abrasion resistant layer 16. |