PRODUCTION OF ELECTROPHOTOGRAPHIC SENSITIVE BODY

摘要

PURPOSE:To enhance the adhesiveness of a photosensitive body to a substrate by maintaining the substrate temp. at the time of forming an a-SiGe layer lower than the substrate temp. at the time of forming an amorphous semiconductor layer. CONSTITUTION:The substrate temp. at the time of forming the amorphous silicon germanium a-Si-Ge layer 2 is maintained lower than the substrate temp. at the time of forming the photoconductive amorphous semiconductor layer 4 in the case of forming the amorphous silicon germanium layer on the conductive substrate 1 by a glow discharge cracking method and forming the amorphous semiconductor layer 4 thereon. Electric charge holding capacity can then be increased without impairing the photoconductivity by changing the substrate temp. within a required range during film formation. As a result, the electric chargeability, photosensitivity and strong exposing potential are greatly improved. The adhesive power of the photosensitive body layer to the substrate is improved.