| 摘要 |
PURPOSE:To detect a molecule directly and to obtain new knowledge about processing by radiating the molecule produced in a film forming process with two laser light beams which differ in wavelength and ionizing it, and monitoring an ion current. CONSTITUTION:The radical molecule produced in a plasma chamber 7 is irradiated with the laser light beams omega1 and omega2 from pigment laser oscillators 3 and 4 and placed in an electron excited state. When the energy of the laser light beams omega1 and omega2 is smaller than the ion threshold value of the molecule, the molecule is not ionized, but when the energy reaches the threshold value, the molecule is ionized and the ion current rises abruptly. At this time, the energy given by the laser light beams omega1 and omega2 meets an ionization potential, so the molecule is ionized without causing fragmentation and the ion current corresponds to only the ion molecule. For the purpose, the ion current is monitored to detect the molecule directly and new knowledge about processing regarding film formation is obtained.
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