发明名称 RESISTOR
摘要 PURPOSE:To obtain a resistor, which also has an excellent controllability of a resistance value and the resistance value of which is not varied by the potential of a wiring metal, by thickening only a section, in which there is the wiring metal crossing on the resistor, in an insulating film formed onto the resistor. CONSTITUTION:An insulating film 13 on a resistor 5 is thickened only in a section, in which there is a wiring metal 12 crossing on the resistor 5, and a second insulating film 14 is shaped between the wiring metal 12 and the insulating film 13. Consequently, the resistance value of the resistor 5 is not varied by the potential of the wiring metal 12. The wiring metal 12 is not disconnected in a contact hole section because the film thickness of the insulating film 13 in the contact hole section is not thickened, and the controllability of the resistance value is also improved because a high-concentration diffusion region 6 need not be shaped.
申请公布号 JPS63213946(A) 申请公布日期 1988.09.06
申请号 JP19870048420 申请日期 1987.03.03
申请人 NIKON CORP 发明人 NISHIDA HIROSHI
分类号 H01L21/31;H01L21/768;H01L21/822;H01L23/522;H01L27/04 主分类号 H01L21/31
代理机构 代理人
主权项
地址