发明名称 MANUFACTURE OF SUPERCONDUCTING ELEMENT
摘要 PURPOSE:To vary and control a potential according to an input voltage by providing a superconducting material having a temperature range between Tc ON set (temperature at which superconduction starts) of a thin film and Tco (temperature at which electric resistance becomes zero in principle) on and insulating substrate having non- superconductivity, and composing a pair of output electrodes through which a current flows from one electrode to the other. CONSTITUTION:A thin superconducting film 2 made of thin superconducting films 3, 4, 5 on a substrate 1 having non-superconductivity, a pair of output electrodes 8, 9, a control electrode 10, and a thin film 11 under the electrode 10 are provided. The substrate uses yttria-stabilized zirconium, and a superconducting material having (A1-xBx)yCuOz, wherein x=0.01-0.3, y=1.3-2.2, z=2-4, and where A is selected from Y, Ga, Zr, Ge and Yb, and B is selected from Ba, Sr, Ca, Mg and Be is used thereon. Simultaneously upon formation or after the formation, it is thermally annealed at 600-900 deg.C for 5-10 hours, patterned, and an insulating film 11 is further formed. Then, the electrodes 10 and 8, 9 are formed of copper or a copper and nickel compound by a vacuum depositing method. Thus, an output current is increased according to the voltage of the control electrode, and controlled.
申请公布号 JPS63228679(A) 申请公布日期 1988.09.22
申请号 JP19870063476 申请日期 1987.03.17
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H01L39/24 主分类号 H01L39/24
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