| 摘要 |
PURPOSE:To specify an troubled relay simply, by diagnosing a trouble of a relay matrix circuit which controls the supply of a program power source to a specified terminal of a semiconductor device to be inspected to perform a display corresponding to the troubled relay. CONSTITUTION:When diagnosing a trouble of a relay matrix circuit 11, all inputs and outputs of a program/measuring power source 10 are set for OV with an internal relay 15. At this point, an IC side relay circuit 12 is turned OFF and instead, a relay circuit 16 for diagnosis turned ON. With such an arrangement, a signal from the relay matrix circuit 11 is introduced into a diagnosis circuit 17. A diagnosis of a trouble of a relay 14 within the circuit 11 is performed by simultaneously turning ON relays 14 arranged sideways in one row within the circuit 11 with a control circuit not illustrated. Thus, it is judged that the relay involved in a terminal in which an input of the circuit 17 is not OV fails.
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