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发明名称
AUTOMATISCHE SCHARFEINSTELLUNGSVORRICHTUNG EINES MIKROSKOPS IN EINER OBERFLAECHENPRUEFVORRICHTUNG
摘要
申请公布号
DE3810882(A1)
申请公布日期
1988.10.20
申请号
DE19883810882
申请日期
1988.03.30
申请人
KANZAKI PAPER MFG. CO., LTD., TOKIO/TOKYO, JP
发明人
MIYAMOTO, SEIICHI, OSAKA, JP;TAJIMA, YO, ASHIYA, HYOGO, JP;MARUKI, MASARU, AMAGASAKI, HYOGO, JP;HANATANI, MASARU, NISHINOMIYA, HYOGO, JP
分类号
G02B7/28;G02B21/24;(IPC1-7):G02B21/24;G01B11/30;G01N21/84;G02B7/11
主分类号
G02B7/28
代理机构
代理人
主权项
地址
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