| 摘要 |
PURPOSE:To obtain a detecting element having excellent selectivity to alcoholic gases by forming an oxidized film of a plasma-polymerized film having metallic gloss and electrode successively on an insulating substrate. CONSTITUTION:The oxidized film of the plasma-polymerized film consisting of an org. tin compd. having the metallic gloss and the electrode are successively formed on the insulating substrate 9. Inorg. materials such as alumina and glass and org. materials such as acrylic resins are used for the substrate 9. Tetramethyl tin, etc., are used as the org. tin compd. for plasma polym. The inside of a plasma reaction vessel 1 is first reduced pressure and the org. tin compd. is introduced through a valve 4 and a flow meter 5 into the vessel 1. A high frequency is impressed from a high-frequency power supply 6 through a matching box 7 to generate electric discharge. Reflected power is suppressed as far as possible by controlling the matching box 7 at this time so that the difference between the impressed power and the reflected power is the arbitrary power. The element formed with the thin tin film as the plasma-polymerized film on the surface of the substrate 9 on the internal electrode 8 is taken out after the discharge for the specified time.
|
