发明名称 |
PLASMA-RESISTANT POLYMERIC MATERIAL |
摘要 |
Polymeric material containing reactive hydrogen functional groups is rendered resistant to an oxygen-containing plasma by reacting the polymeric material with a multifunctional organometallic material such as hexamethylcyclotrisilazane containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material. |
申请公布号 |
AU2012588(A) |
申请公布日期 |
1988.11.10 |
申请号 |
AU19880020125 |
申请日期 |
1988.07.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
NAME NOT GIVEN |
分类号 |
C08L61/00;C08K5/549;C08L33/00;C08L33/02;C08L61/04;C08L61/06;G03C1/00;G03C1/72;G03F7/004;G03F7/038;G03F7/26;G03F7/38;H01L21/027 |
主分类号 |
C08L61/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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