摘要 |
PURPOSE:To obtain a high critical temperature in a good reproductivity by forming a membrane of a specific composition of oxide superconductor consisting of Y, Sc, and a rare earth element which is an oxygen-short type and of a short-scope periodic defect, on a substrate with the thermal expansion coefficient of a specific scope. CONSTITUTION:On a substrate with a thermal expansion coefficient between 8.0X10<-6>K<-1> and 20.0X10<-6>K<-1>, a thin membrane of a high temperature oxide superconductor of Y1Ba2Cu3O7-xtype which is an oxygenshort type and which has a short-scope periodic defection is formed. As a result, since the membrane is not given a stress owing to the thermal expansivity even though the substrate material is heat-treated at a high temperature together with the membrane, a membrane given with a high critical temperature property can be formed in a good reproductivity. Furthermore, by forming a coverage of an MgO membrane over a Cd3Ca5O12 substrate, or CaF2 substrate, as a reaction preventive film, a superconductor membrane with a high critical temperature is formed.
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