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发明名称
摘要
申请公布号	JPS645440(U)	申请公布日期	1989.01.12
申请号	JP19870098461U	申请日期	1987.06.29
申请人		发明人
分类号	B08B3/02;B08B3/10;G03F1/00;H01L21/304	主分类号	B08B3/02
代理机构		代理人
主权项
地址

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