| 摘要 |
PURPOSE:To make it possible to use a conveying device suitably for conveying wafers or the like by providing moving elements each having a head moving up and low, and back and forth in association with the vertical motion of a respective leg part, and by vertically driving leg parts with the use of piezoelectric elements. CONSTITUTION:There are provided on a plurality of moving elements 1, 1... each composed of two leg parts A B formed of highly resilient leaf springs 2, a head part C and a base part D, the leg parts A, B being provided with piezoelectric elements as drive means so as to be moved up and down independently. Accordingly, the head part C may be moved by means of the leg parts A, B, depicting a sequence locus through one cycle composed of steps P, Q, R, S, and be returned to its original position before the initiation of the step P. Further, when N-th row of the moving elements and N+1 row of the moving elements constituting a conveying means are moved so that both carry out an identical motion, a wafer U supported on the head part C may be moved in the direction X by one stroke through one cycle of motion during the period starting the step Q and terminating the step R. |
