摘要 |
PURPOSE:To safely perform deaeration by fixing a pot charged with a sample on a blind flange, moving a cylinder fitted with the flange by gas fed from a high-pressure gas generator, stopping feed of the gas and returning the cylinder in original place to give shock to the pot. CONSTITUTION:Gas is sent to an airtight chamber via a three-way valve 28, a feed and exhaust port 16-1 from a high-pressure gas generator 35 and a cylindrical elastic body 18 is deformed to clamp a pot 34. Further the gas is sent to a valve chamber 33 via the three-way valve 25 and a feed and exhaust port 2-2 from the generator 35 and pushes up a bebel-type valve 4 and is furthermore introduced into a gas chamber 27 via communication holes 5-2, 10-1, 10-2 and a spring 9 is compressed to raise a blind flange 15. Then when operating the three-way valve 25 to return the bebel-type valve 4 in original, the gas in the gas chamber 27 is instantaneously exhausted through exhaust ports 5-1, 1-1, 8-2 via the communication holes 10-2, 10-1, 5-2 and the blind flange 15 is allowed to collide against a buffering member 13 by repulsion of the spring 9 and adhesive substance in the pot is deaerated. |