发明名称 Method and apparatus for checking the signal path of a measuring system
摘要 The disclosure relates to a method and apparatus for checking the signal path in a measuring system of the type having a collector for charged particles and an amplifier connected to its output to form a voltage or current signal. To permit sensitivity tests with currents on the order of 10-12 A and less, it is proposed that a capacitive current, produced by means of a influencing electrode situated in the vicinity of the charge collector, be fed into the charge collector. An electrode already present in the measuring system can be used as the influencing electrode.
申请公布号 US4806765(A) 申请公布日期 1989.02.21
申请号 US19860916822 申请日期 1986.10.09
申请人 LEYBOLD-HERAEUS GMBH 发明人 HEINEN, RAYMOND
分类号 G01N27/62;G01R35/00;H01J41/02;H01J47/02;H01J49/02;H01J49/06;(IPC1-7):G01T1/185;B01D59/44 主分类号 G01N27/62
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