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发明名称
IDENTIFICATION OF SILICON WAFER BY USING IDENTIFICATION MARK
摘要
申请公布号
JPH01102917(A)
申请公布日期
1989.04.20
申请号
JP19870261174
申请日期
1987.10.16
申请人
MITSUBISHI METAL CORP;JAPAN SILICON CO LTD
发明人
IDEGUCHI SEIJI
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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