SPUTTERING TARGET ELECTRODE

摘要

PURPOSE:To facilitate the repair and exchange work of a target block by forming dovetail grooves to the joint surfaces on the front face of a backing plate and the lower side of the target block and fitting both grooves to each other. CONSTITUTION:Plural pieces of the 1st dovetail grooves 11 are formed in parallel atop one side of the backing plate 10 and cooling water paths 10a having a rectangular section are embedded zigzag near approximately the central face in the thickness direction of the backing plate 10. The 2nd dovetail grooves 13 which slide with the 1st dovetail grooves 11 are provided on the rear face of the target block 12 to be joined to the backing plate 10. The 2nd dovetail grooves 13 of the target block 12 are slid and fitted to be matched with the 1st dovetail grooves 11 of the backing plate 10, by which the target block 12 is fixed to the backing plate 10 and is fixed by set screws 14. The surface 12a of the target block 12 is used as a target electrode surface.