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发明名称
METAL DEPOSITION METHOD
摘要
申请公布号
JPH01181417(A)
申请公布日期
1989.07.19
申请号
JP19880002878
申请日期
1988.01.08
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KAKIUCHI TAKAO;FUJII TOYOKAZU;FUJITA TSUTOMU;YAMAMOTO HIROSHI
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
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地址
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